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600µm Travel Range, X-Axis Piezo Flexure Stage

  • 600µm Travel Range, X-Axis Piezo Flexure Stage

Request Price   Ships: Contact | Model RLS-nPX600

Key Features
  • Travel Range (Closed Loop): 600µm
  • Load: 1 kg
  • Max Force (Push/Pull) 100N/20N
  • Piezo Stage Footprint: 60mm x 60mm x 15mm (Width x Depth x Height)
  • Material: Stainless Steel

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MODEL RLS-nPX600
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Product Overview:

nPoint nPX600 nanopositioning stage offers precision travel up to 600 µm in closed loop control. The flexure design stage offers 100 N push and 200 N pull for loads up to 1 kg. Ideal for applications in wafer inspection, mask alignment, and lithography. The piezo stage is made of stainless steel material and inquire about other potential options for stage materials. If your application requires UHV compatibility please contact us to discuss your options.

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