Z Piezo Stage 7mm 1nm

Piezo vertical motion stage from PI. The N-765 is a precision Z stage with piezo stepping drive and sub-nanometer encoder resolution. Travel range is 6.5 mm with a system resolution of 0.5 nm. The integrated sensor is a direct measuring optical linear encoder with a sensor resolution of 0.5 nm. Minimal incremental motion for the system is 1 nm. The sensor measures the position of the motion platform directly eliminating effects from non-linearity, mechanical play, and elastic deformation. A short signal period of 0.5 um for the linear encoder provides a linearity error of less than 1%. Piezo stepper motor technology from PI provides a high resolution drive with low wear. Preloaded actuators are not subject to sliding friction effects and ensures self-locking of the stepping drive. Self-locking drive holds its position at rest and is mechanically stable when switched off as along with consuming no energy or generating heat. Crossed-roller bearings provide a stiff and highly accurate motion. Rolling body cages are force guiding which prevents the roller bearings from creeping. Crosstalk on the X and Y axis during Z motion are 1.8 um and 2 um respectively. The Piezo stepping drive can support a load of 25 N with a drive force of 20 N max. The passive holding force for the system is 25 N. High precision positioning vertical stage lends itself to applications such as sample manipulation, precision mechanics in the semiconductor industry, micro-manipulation, microscopy, confined spaces, sample positioning, and vacuum or nonmagnetic environments. The N-765 Z stage can be mounted directly to any N-565 linear positioner for multi axis applications.