Long Travel Range Piezo Stage, 1800µm

Long travel range PI piezo stage with integrated sensors for closed loop operation. The long travel range of this stage is 1800 µm with a resolution of 2 nm, shorter travel stages from this PI series have resolution down to 0.1nm. With the digital PI controller the stage can achieve closed loop repeatability of ±14 nm and lineartiy of 0.03%. The capacitive sensors provide this Piezo Stage direct position metrology for closed-loop operation. This piezo stage is designed for demanding industrial or research applications requiring operation in ultra-high vacuum environements.