Motorized Linear Stage 150mm 10um 50mms

Motorized translation stage with 150 mm of motion range part of XA16F series from Kohzu. Driven by a 5-stage stepper motor with full step resolution of 10 um, half step resolution of 5 um, and microstep (1/20 dev) resolution of 0.5 um. Linear guide mechansim keeps the horizontal and vertical straightness over the entire 300 mm of travel to less than 5 um with a moment load stiffness of 0.02 arcsec/N*cm. Repeatability for the system is within +/- 0.5 um with a backlash of less than 2 um. Lead mechanism is a ball screw with a lead of 5.0 mm and an accumulated lead error of less than 20 um over the 300 mm range. Horizontal load capacity for the stage is 392 N and the maximum velocity is 50 mm/sec. Table has dimensions of 160 mm x 160 mm and is machined out of aluminum alloy and mounted to a steel body then finished in a matte black. Motion stage weight is 18.2 kg. Lubricants for motion stage applications in clean rooms or vacuum environment are available upon request. Clean room lubricant model has "-C" following model number and vacuum lubricant model has "-V" following the model number. Option for standard or mirrored configuration on each stage, mirrored stages have "-R" at end of model number. The XA16F series stages are available in 100 mm, 200 mm, and 300 mm travel options.