Motorized XY Stage 190mm 500mms

Motorized XY translation stage from Newport. Ultra-low profile stage from the One-XY series offers a dynamic performance in a simple integrated three-plate design. The ONE-XY200 gives 190 mm x 190 mm travel range. Monolithic construction combined with a crossed roller bearing guide mechanism achieve excellent geometric performance with nanometer level repeatability and micron scale straightness and flatness. Bi-directional repeatability of +/- 0.09 um with a guaranteed accuracy of 0.05 um. Straightness and flatness across the travel are within +/- 2 um. The stiff design of the system gives a yaw and pitch of +/- 90 urad and a roll of 72 urad. Orthogonality for the ONE-XY200 is 96 urad. Stage is driven by a non-cogging ironless core linear motor capable of a max acceleration of 0.2 G with a max speed of 500 mm/s. Linear encoder is non contact as well to produce a robust reliable stage. Load capacity is 150 N normal to the stage table. The anodized aluminum construction gives the system a mass of 12 kg. A high accuracy performance option (ONE-XY200HA) is offered with a increase in accuracy at +/- 0.4 um. The ONE-XY series also come in travel options from 50mm x 50mm to 290 mm x 290 mm to meet a variety of positioning needs.